Iodination of Magnetron Sputtered Cu3N Films.

• 1 January 1992
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 35  (3) , 248-251
• https://doi.org/10.3131/jvsj.35.248

Abstract

Keywords

• MAGNETRON SPUTTERED
• IODINATION OF MAGNETRON
• SPUTTERED CU3N FILMS