The Design and Performance of a High-Speed Economical Ultrahigh Vacuum Chamber Utilizing Titanium Sublimation
- 1 September 1972
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 43 (9) , 1301-1306
- https://doi.org/10.1063/1.1685910
Abstract
The pumping action produced by evaporating titanium onto very large surfaces held between 78 and 300 K has been studied inside a 60 liter steel tank. The present design offers high pumping speed at pressures below 10−9 Torr. The partial pressures of different residual gases under operational conditions were measured with a mass spectrometer. The partial pressures of several gases are reported as a function of temperature.Keywords
This publication has 4 references indexed in Scilit:
- Preparation and Electrical Resistivity of Ultrahigh Purity NiobiumJournal of the Electrochemical Society, 1971
- The ratio of the upper two critical fields in pure NbSolid State Communications, 1968
- The performance of a high speed getter pump using a cooled titanium filmVacuum, 1965
- Performance of a simple cryo-getter pumpVacuum, 1965