Direct Electron Beam Data Writing Technology for 128K EB-ROM

• 1 January 1979
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 18  (S1)
• https://doi.org/10.7567/jjaps.18s1.295

Abstract

Keywords

• DIRECT ELECTRON
• WRITING TECHNOLOGY
• DATA WRITING
• EB ROM
• 128K EB
• BEAM DATA
• ELECTRON BEAM
• CARD CLEARANCE
• ROM SECURE