Surface processing with ionized cluster beams: computer simulation
- 1 June 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 153 (1-4) , 199-208
- https://doi.org/10.1016/s0168-583x(99)00047-6
Abstract
No abstract availableThis publication has 36 references indexed in Scilit:
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