The use of neutral Cs vapor flow in a negative-ion sputter source
- 1 February 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 234 (3) , 401-403
- https://doi.org/10.1016/0168-9002(85)90981-7
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Emission of Negative Ions from Metal Surfaces Bombarded by Positive Cesium IonsJournal of Applied Physics, 1962