Thermal Wave and Lightscattering Measurements on Differently Processed Si-Wafers

Publisher Website

1 January 1988

journal article
Published by Springer Nature in MRS Proceedings

Vol. 138
https://doi.org/10.1557/proc-138-267

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Laser Analytical Spectrochemistry and Laser Photoionization Spectroscopy and Photoacoustic and Thermal Wave Phenomena in Semiconductors
Physics Today, 1989
Semiconductor Silicon
Published by Springer Nature ,1989