High‐resolution Electron Microscopy of semiconductors and metals
- 1 July 1991
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 3 (7-8) , 368-378
- https://doi.org/10.1002/adma.19910030708
Abstract
Review: Two‐dimensional information on the microstructure of materials at a resolution comparable to interatomic distances is crucial for the study of interfaces, defects, growth mechanisms etc. One of the most important analytical methods for gaining such information is high‐resolution electron microscopy (HREM). The interpretation of the results on semiconductors, magnetic alloys and multilayers, can often be facilitated through image processing and simulation.Keywords
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