Use of a multichannel pulse height analyser for the analysis of back‐scattered SEM images

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Abstract
SUMMARY: The use of a simple electronic switch to convert the video signal from a scanning electron microscope to a series of pulses is described. A multichannel pulse height analyser may then be used to perform quantitative image analysis. Examples are given showing how composition analysis, area fraction measurement and image contouring may be performed using the atomic number contrast signal from a back‐scattered electron detector. Other detector systems such as scintillators or specimen current imaging could also be used.