Sputter yields of ammonium chloride and solid glycerol

Abstract
We have measured the sputtering yields of ammonium chloride and of frozen glycerol films under 8 keV Ar bombardment using a thin film depth profiling technique. The sputtering yield of ammonium chloride was 34±3 molecules (NH4Cl)/ion; for frozen glycerol the sputter yield was 54±9 molecules/ion. The results constrain possible mechanisms of damage suppression in organic secondary ion mass spectrometry.

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