Discussion of “The Incorporation of Phosphorus in Silicon Epitaxial Layer Growth” [J. Bloem, L. J. Gilling, and M. W. M. Graef (pp. 1354–1357, Vol. 121, No. 10)]
- 1 June 1975
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 122 (6) , 840-842
- https://doi.org/10.1149/1.2134345
Abstract
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