Energy broadening of an electron optical line source
- 1 November 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 7 (6) , 1878-1881
- https://doi.org/10.1116/1.584684
Abstract
The energy broadening due to electron–electron interactions of an electron optical line source and a line shaped beam have been theoretically analyzed and compared to its axially symmetric counterpart. An analytical approach was developed to evaluate the energy spread in an electron source.Monte Carlo methods were used to evaluate the energy broadening induced in a thin electron optical lens of 10× magnification. The results predict that the focusing of line shaped beams have an induced energy spread up to 27% lower than round beams.Keywords
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