Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates

19 March 1984

proceedings article
Published by SPIE-Intl Soc Optical Eng

p. 25-37
https://doi.org/10.1117/12.939204

Abstract

Free-standing transmission gratings and zone plates which are to be used as dispersion elements for x rays have been fabricated with UV holography and x-ray lithography.

Keywords

FABRICATION
X-RAYS
ZONE PLATES
DISPERSION
HOLOGRAPHY
ULTRAVIOLET RADIATION
X-RAY LITHOGRAPHY

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