High Resolution Assembly of Patterned Metal Oxide Thin Films via Microtransfer Molding and Electrochemical Deposition Techniques

Abstract
A versatile method for preparing patterned thin films of metal oxides and related materials on transparent, conductive indium‐tin oxide (ITO) glass platforms is reported. Micrometer‐sized features are formed by microtransfer molding of an optically transparent, thermally curable epoxy on ITO substrates followed by cathodic electrodeposition of the metal oxide from aqueous metal‐hydrogen peroxide solutions. Atomic force microscopy was used to characterize the resulting microstructure and to examine effects of sintering on the patterned thin films. ©1999 The Electrochemical Society

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