Effect of energetic bombardment on the magnetic coercivity of sputtered Pt/Co thin-film multilayers
- 4 June 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (23) , 2345-2347
- https://doi.org/10.1063/1.102912
Abstract
Pt/Co multilayers are an attractive candidate for a magneto-optical recording medium. However, films sputter deposited in Ar have coercivities too small (100–350 Oe) to be practical in recording. By sputter depositing multilayers in Kr or Xe instead of Ar, we achieved coercivities ∼1000 Oe, suitable for recording. We attribute the lower coercivity of Ar-sputtered films to interfacial mixing of Pt and Co layers by energetic bombardment from Ar gas atoms that recoil from the Pt target.Keywords
This publication has 9 references indexed in Scilit:
- Perpendicular magnetic anisotropy and magneto-optical Kerr effect of vapor-deposited Co/Pt-layered structuresJournal of Applied Physics, 1989
- Magneto-Optical Properties in Ultrathin Co/Pd and Co/Pt Multilayer FilmsJapanese Journal of Applied Physics, 1989
- Perpendicular magnetic anisotropy in Pd/Co and Pt/Co thin-film layered structuresJournal of Applied Physics, 1988
- Effects of annealing and ion implantation on the magnetic properties of Pd/Co multilayers containing ultrathin CoIEEE Transactions on Magnetics, 1987
- Magnetic interface anisotropy in Pd/Co and Pd/Fe multilayersJournal of Magnetism and Magnetic Materials, 1987
- Perpendicular magnetic anisotropy in Pd/Co thin film layered structuresApplied Physics Letters, 1985
- The thermalization of energetic atoms during the sputtering processJournal of Vacuum Science & Technology A, 1984
- Thermalization of sputtered atomsJournal of Applied Physics, 1981
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980