Abstract
The existence of a very prominent diffusion effect during ion bombardment of Cu and Zn targets at room temperature and Zn targets at 77 K is demonstrated by measuring trapped amounts and sputtering coefficients at 77 K and comparison with the behaviour at room temperature. Further information is obtained by investigating the distribution of trapped Ni projectile atoms in the substrates by argon ion sputtering and x-ray fluorescence analysis. The argon ion bombardment advances the Ni in the Zn at room temperature. The results can have a bearing on the interpretation of observations of noble gas ion bombardment as well as of the ranges of ions in metals. It also appears that the method of removing representative layers from a surface by noble gas ion sputtering is not generally valid.