Reduction of backgating effect in MBE-Grown GaAs/AlGaAs HEMT's
- 1 June 1987
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 8 (6) , 280-281
- https://doi.org/10.1109/edl.1987.26630
Abstract
We have investigated the backgating effect in high electron mobility transistors (HEMT's) fabricated on MBE-grown GaAs/AlGaAs layers, which is undesirable for LSI fabrication. Comparing five different types of devices, we related the backgating effect to the interface between the GaAs substrate and the undoped GaAs buffer layer. By using a thermally etched GaAs substrate, we successfully reduced the backgating to the same order as that of ion-implanted GaAs MESFET's.Keywords
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