Polymere für die 193-nm-Mikrolithographie: regioreguläre 2-Alkoxycarbonylnortricyclen-Polymere durch kontrollierte Cyclopolymerisation von sperrigen Norbornadiencarbonsäureestern
- 2 March 1998
- journal article
- zuschrift
- Published by Wiley in Angewandte Chemie
- Vol. 110 (5) , 685-688
- https://doi.org/10.1002/(sici)1521-3757(19980302)110:5<685::aid-ange685>3.0.co;2-x
Abstract
No abstract availableKeywords
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