Static SIMS applications—From silicon single crystal oxidation to DNA sequencing
- 1 May 1985
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 3 (3) , 451-460
- https://doi.org/10.1116/1.573015
Abstract
Static secondary ion mass spectrometry is a hydrogen-, isotope-, and compound-sensitive technique for monolayer analysis. Originally it was applied mainly for the determination of surface composition in surface reaction studies and for the investigation of the secondary ion formation process itself. More recently it has been shown that static SIMS allows high sensitivity detection identification, and structural analysis of large and thermally labile organic molecules such as, e.g., oligopeptides, -nucleotides, and -saccharides. This opens new fields of applications in the life sciences and many related areas.Keywords
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