A compact three-axis cryogenic ultrahigh vacuum manipulator

• 1 January 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 8  (1) , 145-146
• https://doi.org/10.1116/1.577048

Abstract

Keywords

• COMPACT
• AXIS CRYOGENIC
• CRYOGENIC ULTRAHIGH
• VACUUM MANIPULATOR
• ULTRAHIGH VACUUM