Ozone Passivation Technique for Corrosive Gas Distribution System

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Abstract
A passivation technique using highly concentrated ozone has been developed for electropolished stainless steel tubings that supply corrosive gases. The strong oxidizing ability of ozone enables the inner surface to form an anticorrosive passivation film with thickness up to 60 Å under room temperature and atmospheric pressure conditions. The ozone passivation film has excellent resistance to pitting corrosion. An improvement of corrosion resistance of the ozone-passivated surface was proven by the evaluation of the concentration of dissolved metals and particle generation after exposure to ClF3. Moreover, we discuss the mechanism of ozone passivation reaction on the stainless steel surface.

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