New formation technology for a plasma display panel barrier-rib structure using a precise metal mold fabricated by the UV-LIGA process
- 19 December 2001
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (1) , 63-69
- https://doi.org/10.1088/0960-1317/12/1/310
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Non-conventional technologies for micro-optical components: a surveyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986