Diatomic versus atomic secondary ion emission
- 15 September 1975
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 27 (6) , 318-320
- https://doi.org/10.1063/1.88484
Abstract
The yield ratio of diatomic versus atomic secondary ion emission from metals and semiconductors has been studied using two different mass spectrometers. Under ultrahigh vaccum conditions and with argon primary ions, yield ratios in excess of unity were observed for a variety of elements at secondary ion energies below about 10 eV.Keywords
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