Interferometric Monitoring Of Spindle And Workpiece On An Ultra-Precision Single-Point Diamond Facing Machine

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Abstract
Investigations, using a two-axis vertical-spindle single-point diamond tool lathe to study the facing of discs, showed that, in order to establish and control conditions for cuts approaching 100nm, it was necessary to monitor the spindle for transient run-out and longer-term growth and to measure in-process the orientation of the work-face. Accordingly, an optical (Fizeau) interferometer was incorporated in alignment with the spindle so that orientation and axial motion of the face-plate and/or the work-piece could be observed and recorded and the measured data used for correction. Special requirements and problems associated with using an interferometer to monitor the 'dynamic planarity' of a rotating surface are addressed; instrumental considerations are discussed and results described.© (1989) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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