High current density plasma cathode
- 1 September 1985
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 47 (5) , 468-470
- https://doi.org/10.1063/1.96150
Abstract
A grid-controlled plasma cathode has been operated at high current density (15 A/cm2) using vacuum insulator breakdown as the plasma source. The insulator spark generates a highly reproducible, 6-μs plasma pulse with density 1013 cm−3 at a distance of 6 cm. A number of sparks can be driven in parallel to supply large area plasma cathodes.Keywords
This publication has 2 references indexed in Scilit:
- Grid-controlled plasma cathodesJournal of Applied Physics, 1985
- Plasma etching of Si and SiO2 in SF6–O2 mixturesJournal of Applied Physics, 1981