Turbomolecular pumps and their limitations for hydrocarbon-free systems
- 1 January 1988
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 171 (1) , 366-375
- https://doi.org/10.1063/1.37286
Abstract
Starting from the operating principle of turbomolecular pumps (TMP’s),, some theoretical considerations concerning their volume flow rate (pumping speed) and compression are given. The impact of speed and compression on the ultimate pressure and the cleanlines of the vacuum is explained. The level of hydrocarbons in the vacuum system depends on many factors, including the cleanliness of the vacuum system, the backing pump, the turbomolecular pump, and the type of vacuum seals (metal, viton O‐rings, etc.). In addition, the procedure of stopping and venting the TMP plays a very important role in the cleanliness of the vacuum, and some simple operating rules must be observed.Keywords
This publication has 0 references indexed in Scilit: