Improvement of CMOS latch-up immunity using a high energy implanted buried layer

• 1 February 1989
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• Vol. 37-38, 960-964
• https://doi.org/10.1016/0168-583x(89)90334-0

Abstract

Keywords

• LATCH
• FABRICATED
• CMOS
• IMPLANTED BURIED
• HIGH ENERGY IMPLANTED
• EPI
• WAFER