WO3 thin film prepared by PECVD technique and its gas sensing properties to NO2

• 1 January 2001
• journal article
• Published by Springer Nature in Journal of Materials Science
• Vol. 36  (10) , 2535-2538
• https://doi.org/10.1023/a:1017950619864

Abstract

Keywords

• BEHAVIOR
• WO3
• SENSORS
• FILMS
• THIN FILM
• GAS SENSING
• TUNGSTEN
• STRUCTURES