Acoustic signals from laser-annealed amorphous silicon
- 1 November 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 43 (9) , 826-828
- https://doi.org/10.1063/1.94509
Abstract
Acoustic signals generated by Q-switch laser irradiation of amorphous Si have been investigated as a function of incident laser fluence. Marked discontinuities in the signal at the recrystallization threshold and at the damage threshold are found. The results indicate that the first effect is due to melting and the second is due to evaporation.Keywords
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