Fabrication of parallel quasi-one-dimensional wires using a novel conformable x-ray mask technology
- 1 November 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 10 (6) , 3196-3199
- https://doi.org/10.1116/1.585911
Abstract
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