Diamond Machining And Mechanical Inspection Of Optical Components
- 24 March 1982
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0316, 32-41
- https://doi.org/10.1117/12.933123
Abstract
Displacement measurement and motion control are discussed for rotary and linear axes of motion, as necessary for the dimensional measurement and diamond-tool machining of grazing incidence x-ray optics. Examples of available performance levels are drawn from measurements made on current developmental hardware, and are coupled with speculation on possible future extensions.Keywords
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