Hydrodynamic description of CVD processes
- 1 January 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 40, 13-26
- https://doi.org/10.1016/0040-6090(77)90099-2
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Silicon Epitaxial Growth by Rotating Disk MethodJournal of the Electrochemical Society, 1972
- Gas Flow Pattern and Mass Transfer Analysis in a Horizontal Flow Reactor for Chemical Vapor DepositionJournal of the Electrochemical Society, 1972