ORMOCER®S – Inorganic-Organic Hybrid Materials for e/o-Interconnection-Technology
- 1 December 2000
- journal article
- Published by Taylor & Francis in Molecular Crystals and Liquid Crystals
- Vol. 354 (1) , 123-142
- https://doi.org/10.1080/10587250008023608
Abstract
Hybrid inorganic-organic polymers (ORMOCER®s) have been developed and tested for evaluation in optical and electrical interconnection technology. The photopatternable materials with negative resist behaviour are composed of inorganic oxidic structures cross-linked or substituted by organic groups. They are prepared from organosilane precursors by sol-gel-processing in combination with organic crosslinking of polymerizable organic functions. As a result of these functionalities the properties of the ORMOCER®s can be adjusted to particular applications. Systematic variation of composition combined with adaptation to micro system technology allows great flexibility in processing. The main features of these materials are:Keywords
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