Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD

• 1 April 2002
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 389-393, 175-178
• https://doi.org/10.4028/www.scientific.net/msf.389-393.175

Abstract

Keywords

• 4H-SIC (03-38) PLANE
• CHEMICAL VAPOR DEPOSITION (CVD)
• DEEP LEVEL
• PHOTOLUMINESCENCE (PL)