Factors influencing the accuracy of a quartz-crystal-oscillator as a thickness monitor for thin film deposition
- 1 March 1968
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 1 (5) , 400-402
- https://doi.org/10.1016/0040-6090(68)90032-1
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Verwendung von Schwingquarzen zur W gung d nner Schichten und zur Mikrow gungThe European Physical Journal A, 1959