The use of four-point probe sheet resistance measurements for characterizing low dose ion implantation
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 382-388
- https://doi.org/10.1016/0168-583x(85)90661-5
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: