On the performance of diamond film polishing apparatus developed.

• 1 January 1989
• journal article
• Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
• Vol. 55  (1) , 77-80
• https://doi.org/10.2493/jjspe.55.77

Abstract

Keywords

• DIAMOND FILM
• FILM POLISHING
• POLISHING APPARATUS
• APPARATUS DEVELOPED
• PERFORMANCE