Silicon cylinder grown on the surface of a silicon wafer
- 1 December 1997
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 182 (3-4) , 337-340
- https://doi.org/10.1016/s0022-0248(97)00368-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
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- Oxidation sharpening of silicon tipsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Fabrication of Non‐Underetched Convex Corners in Anisotropic Etching of (100)‐Silicon in Aqueous KOH with Respect to Novel Micromechanic ElementsJournal of the Electrochemical Society, 1990