A piezoelectric triaxial accelerometer
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1) , 131-133
- https://doi.org/10.1088/0960-1317/6/1/032
Abstract
A new piezoelectric silicon accelerometer design is presented. The design allows sensing in three directions. The accelerometer is designed to have a detection level of and a resonance frequency of 10 kHz.Keywords
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