Structure and chemical composition of RF-sputtered boron nitride films
- 16 February 1985
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 87 (2) , K119-K121
- https://doi.org/10.1002/pssa.2210870242
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Radio frequency sputter deposited boron nitride filmsJournal of Vacuum Science & Technology A, 1984
- Low Temperature Double‐Plasma Process for BN Films on SemiconductorsJournal of the Electrochemical Society, 1982
- Friction and Transfer Behavior of Pyrolytic Boron Nitride in Contact with Various MetalsA S L E Transactions, 1978