Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors
- 1 June 2000
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 53 (1-4) , 521-524
- https://doi.org/10.1016/s0167-9317(00)00369-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Large scale nanolithography using nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995
- Fabrication and characterization of a nanosensor for admittance spectroscopy of biomoleculesJournal of Vacuum Science & Technology A, 1995