A kinematic model of surface evolution during growth and erosion: Numerical analysis
- 1 November 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (6) , 3222-3232
- https://doi.org/10.1116/1.576340
Abstract
A concise and critical review of the basic ideas of the kinematic model of surface evolution during growth and erosion is presented. Further generalization of a recent development based on the Huygens principle of wave-front propagation is briefly discussed. Numerical analysis and consequent numerical procedures based on the generalized kinematic model are also presented. A number of simulation examples of surface evolution are given to illustrate the advantages and capabilities of the numerical method.Keywords
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