Effect of Oxygen Impurities on the Nitridation of High‐Purity Silicon
- 1 March 1973
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 56 (3) , 171-172
- https://doi.org/10.1111/j.1151-2916.1973.tb15436.x
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Kinetics of the Oxidation and Nitridation of Silicon at High TemperaturesThe Journal of Physical Chemistry, 1958