Analysis of an ONO gate film effect on n- and p-MOSFET mobilities

• 1 January 1990
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 131-132
• https://doi.org/10.1109/vlsit.1990.111043

Abstract

Keywords

• MOSFET MOBILITIES
• GATE FILM EFFECT
• ONO GATE FILM