Multi-Wafer VPE Growth and Characterization of SiC Epitaxial Layers

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 173-176
• https://doi.org/10.4028/www.scientific.net/msf.338-342.173

Abstract

Keywords

• EPITAXIAL GROWTH
• GROWTH RATE
• MULTI-WAFER REACTOR
• PRODUCTION