On-chip manipulation and magnetization assessment of magnetic bead ensembles by integrated spin-valve sensors

Manipulation and detection of magnetic beads on a semiconductor chip opens up new perspectives for analysis of magnetically labeled specimens in biomechanical micro-electromechanical systems for biological applications. Sensitive spin-valve sensors were integrated with magnetic field generating conductors to assess the behavior of ensembles of superparamagnetic nanoparticles 300 nm in diameter that contain 75%–80% magnetite. The spin-valve multilayer including a nanooxide layer achieves 8% magnetoresistance (MR) for an integrated device of $\text{2×16\hspace{0.17em}μ}{\mathrm{m}}^2.$ Motion of the magnetic particles towards and across the sensor is achieved by two tapered magnetic field generating current conductors. The spin-valve sensor detects the stray magnetic field that emanates from the ensemble of magnetic particles. We study the transients in the magnetic signal on the order of 1% MR. These results lead to a model that describes magnetization configurations of the cluster of beads.