A Fabry-Perot microinterferometer for visible wavelengths
- 2 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
The authors report on their efforts to develop a silicon-based microinterferometer for optical applications in the visible spectral region using micromachining fabrication techniques. The interferometer is formed by two parallel dielectric mirrors supported on membranes which are electrostatically deflected for wavelength control. A simplified two-wafer fabrication process was designed and investigated. They obtained 250 nm membrane deflection for an applied voltage of 100 V. Hafnium dioxide-silicon dioxide dielectric mirrors with high reflectivity and low stress were fabricated on membrane supports and also free-standing. Anticipated applications include microinstrument spectroscopy systems for atomic absorption, ellipsometry, imaging, optical fiber communications, and general spectrophotometer uses as well as accelerometry.<>Keywords
This publication has 7 references indexed in Scilit:
- Vacuum-sealed silicon micromachined incandescent light sourcePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Fabrication of active integrated optical micro-encoderPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micro-magnetic alloy tubes for switching and splicing single-mode fibersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Synthetic Diamond Micromechanical Membranes, Cantilever Beams, and BridgesJournal of the Electrochemical Society, 1990
- A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm supportPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Microactuators for aligning optical fibersSensors and Actuators, 1989
- Micromechanical light modulator array fabricated on siliconApplied Physics Letters, 1977