FACE-CENTERED-CUBIC TUNGSTEN FILMS OBTAINED BY
- 1 December 1966
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 9 (11) , 402-405
- https://doi.org/10.1063/1.1754629
Abstract
Thick, stable tungsten films with fcc structure have been obtained by ion beam sputtering in vacuum onto substrates of glass, rock salt, and mica at a temperature of ∼250–400°C. The lattice constant is 4.15 Å. The fcc phase transforms slowly to bcc at annealing temperatures of ∼700°C.Keywords
This publication has 3 references indexed in Scilit:
- Scanning Electron Diffraction of Film GrowthJournal of Vacuum Science and Technology, 1966
- Superconductivity in Films ofTungsten and Other Transition MetalsPhysical Review Letters, 1965
- Ion bombardment of metal surfacesVacuum, 1961