Planar microfabricated polymer light-emitting diodes

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Abstract
Conjugated polymers are organic semiconducting materials that can emit light. These polymers have the advantages of being light, cheap and easy to process, and in addition the band gap can be tailored. We report the microfabrication of surface light-emitting diodes (SLEDs) on silicon substrates in which the electrodes are underneath the organic electroluminescent layer. Patterned electrodes are separated by a 2500 Å thick insulating layer of silicon oxide or are interdigitated with a separation of 10 or 20 m; the luminescent polymer is spin coated or solvent cast on top of the electrodes. This fabrication method is completely compatible with conventional silicon processing because the polymer is deposited last and the light is emitted from the upper surface of the diodes. Despite the large spacing between electrodes, and despite the absence of an evaporated top contact, the voltages required for light emission were not much greater than those used in conventional sandwich-type structures.