Subharmonics and rf-plasma sheaths
- 9 August 1993
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 71 (6) , 863-866
- https://doi.org/10.1103/physrevlett.71.863
Abstract
Period doubling and concomitant subharmonic generation have been reported in rf-excited plasmas. We show that this phenomenon is caused by the nonlinear interaction of the plasma-sheath capacitance with the external rf power circuits. As a result, changes in the external circuits can be used to control period doubling. Sheath capacitance can be derived from electrical measurements of period doubling.Keywords
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