Low-Energy Collisions of Group IIIA, IVA, VA, VIA, and VIIA Ions with fluoroalkyl SAM Surfaces: Reactions, Chemical Sputtering, and Mechanistic Implications
- 1 September 1994
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 98 (37) , 9301-9311
- https://doi.org/10.1021/j100088a035
Abstract
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